Reno Sub-Systems, a Sparks, NV-based developer of technologies for the semiconductor and advanced microelectronic industries, closed a $14m Series B funding.
The round was led by MKS Instruments.
The company intends to use the funds to win more platforms and move into high-volume manufacturing to cover demand.
Led by Bob MacKnight, CEO, Reno Sub-Systems has developed high-performance radio frequency (RF) matching networks, RF power generators and gas flow management systems for semiconductor manufacturing. The company’s enabling technologies aim to open the way to plasma processing (critical in the fabrication of advanced microelectronic circuits) to deep submicron feature sizes and short process times needed for both planar and 3D device architectures. In addition to new process regimes, they also facilitate “always on” plasma management, fast gas transitions and low-flow management, reducing on-wafer particles and cost per transistor as well as improving film properties.
FinSMEs
05/06/2016